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Intellidrives Offers Direct Drive Rotary Stage!

ACR-32UT has a very wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and can accelerate quickly to 1,500 rpm.

Intellidrives Motion Control Component - Rotary Table

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Philadelphia, PA, -- Motion Control Components and Systems - The ACR-32UT precision rotation stage is a low profile rotary table with a high-speed direct-drive rotary servo motor. The 32 mm center aperture and lightweight construction makes this rotary stage an ideal choice for handling 300 mm silicon wafers for semiconductor processing

ACR-32UT has a very wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and can accelerate quickly to 1,500 rpm. This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.

These features make the ACR-32UT outperform the stability, acceleration and settling speed of traditional servo motor gear-driven mechanisms, according to the company. IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.

System Performance

Unit

ACR-32UT

Center aperture

mm

32

Outside diameter

mm

116

Stage height

mm

22

Peak Torque

Tp

 (Nm)

15

Continuous torque

air cooling, coil 120°C

Tc120

(Nm)

5

Peak current at Tp

Amp p rrms

15

Continuous current at Tc

Amp c rrms

4

Recommended voltage (note 1)

Uvdc

Uvac

310

220

Max speed  

(note 2, 3)

RPM

1,400

Positioning resolution

(note 3)

counts/rev

 

3,600,000 (standard)

7,200,000

(optional)

Positioning resolution

(arc-sec)

0.60

Accuracy

Arc-sec

<10

Repeatability

Arc-sec

<1

Run-out axial/radial

micron

<10

Rotor Inertia

kg x m2

0.05

Stage weight

M (Kg)

3

>

Axial load

M (Kg)

10

 

Note 1: Rotary table can operate at lower voltages with lower speeds

Note 2: Max speed shown with no external torque applied

Note 3: Max speed may be limited by controller's encoder frequency input.

            Sin/cos 1 Vpp and other encoder resolutions available.

            Contact the factory.


Intellidrives Motion Control Component - Rotary Table
























































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About IntelLiDrives

IntelLiDrives, Inc. manufactures linear actuators, XY tables and rotary tables for the industry, government, science and research institutions around the world. Our precision rotary actuators, XY stages and linear actuators are used in the applications in medical devices, life sciences, semiconductor and electronic assembly manufacturing, data storage, laser processing, military/aerospace, photonics, automotive and test assembly, research and development and other industries requiring high precision and throughput motion control solutions.

For further information on this new product or others in our extensive product portfolio, call 1-215-728-6804 or e-mail Intellidrives at sales@intellidrives.com.com or go Intellidrive - Contact Us at: www.intellidrives.com/contact-us



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