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Open Frame XY-Rotary Systems from Intellidrives!

Intellidrives Motion Control Components - ARC Series XY Rotary Tables

Motion Control Components - Intellidrives-Logo

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Philadelphia, PA, -- Motion Control Components and Systems - Open-frame low profile XY-Rotary stages designed for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear unobstruced access to the wafer from both sides.


Parameters
Unit

XY-OF-UL-200x200+ACR160UT 

 

XY-OF-UL-280x280+ACR260UT 

XY-OF-UL-350x350+ACR335UT 

 

XY table

 

 

XY-OF-UL-200x200

XY-OF-UL-280x280

XY-OF-UL-350x350

 

Rotary table  

ACR-160UT

ACR-260UT

ACR-335UT

Motor type

 

brushless servo motor /encoder (standard)

linear servo motor (option)

XY stroke

mm x mm

 

200 x 200

-

 

280 x 280

 

-

 

350 x 350

 

-

Angular rotation deg -

360

-

360

-

360

Center aperture

dia mm

160

260

335

Resolution (linear)

micron

1 (note 1,2)

2.5 (note 3)

-

1 (note 1,2)

2.5 (note 3)

-

1 (note 1,2)

2.5 (note 3)

-
Resolution (rotary) arc-sec -

1.4

-

1

-

0.9

Repeatability (linear)

micron

5 (note 3)

1 (notes 1,2)

Repeatability (rotary) arc-sec 2

Speed

mm/sec

400  (note 3)

800  (note 2)

Load weight kg 30

Stage weight

kg

16

22

28

 

(note 1)     with linear encoder (option)

(note 2)     with linear servo  motor (option)

(note 3)     ball screw 10 mm lead, brushless servo driven



For additional information on unit XY-OF-UL-200x200+ACR160UT CLICK HERE!

For additional information on unit XY-OF-UL-280x280+ACR260UT CLICK HERE!

For additional information on unit XY-OF-UL-350x350+ACR335UT CLICK HERE!

Intellidrives Motion Control Components - ARC Series XY Rotary Tables (drawings)





















About IntelLiDrives --

IntelLiDrives, Inc. manufactures linear actuators, XY tables and rotary tables for the industry, government, science and research institutions around the world. Our precision rotary actuators, XY stages and linear actuators are used in the applications in medical devices, life sciences, semiconductor and electronic assembly manufacturing, data storage, laser processing, military/aerospace, photonics, automotive and test assembly, research and development and other industries requiring high precision and throughput motion control solutions.

For further information on this new product or others in our extensive product portfolio, call 1-215-728-6804 or e-mail Intellidrives at sales@intellidrives.com.com or go Intellidrive - Contact Us at: www.intellidrives.com/contact-us



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