Open Frame XY-Rotary Systems from Intellidrives!

Philadelphia, PA, -- Motion Control Components and Systems - Open-frame low profile XY-Rotary stages designed for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear unobstruced access to the wafer from both sides.
Parameters
|
Unit |
XY-OF-UL-200x200+ACR160UT
|
XY-OF-UL-280x280+ACR260UT
|
XY-OF-UL-350x350+ACR335UT
|
XY table
|
|
XY-OF-UL-200x200
|
XY-OF-UL-280x280
|
XY-OF-UL-350x350
|
Rotary table |
|
ACR-160UT
|
ACR-260UT
|
ACR-335UT
|
Motor type
|
|
brushless servo motor /encoder (standard)
linear servo motor (option)
|
XY stroke
|
mm x mm
|
200 x 200
|
- |
280 x 280
|
-
|
350 x 350
|
-
|
Angular rotation |
deg |
- |
360
|
- |
360
|
- |
360
|
Center aperture
|
dia mm |
160
|
260
|
335
|
Resolution (linear)
|
micron
|
1 (note 1,2)
2.5 (note 3)
|
-
|
1 (note 1,2)
2.5 (note 3)
|
- |
1 (note 1,2)
2.5 (note 3)
|
- |
Resolution (rotary) |
arc-sec |
- |
1.4
|
- |
1
|
- |
0.9
|
Repeatability (linear)
|
micron |
5 (note 3)
1 (notes 1,2)
|
Repeatability (rotary) |
arc-sec |
2 |
Speed
|
mm/sec |
400 (note 3)
800 (note 2)
|
Load weight |
kg |
30 |
Stage weight
|
kg |
16
|
22
|
28
|
(note 1) with linear encoder (option)
(note 2) with linear servo motor (option)
(note 3) ball screw 10 mm lead, brushless servo driven
For additional information on unit XY-OF-UL-200x200+ACR160UT CLICK HERE!
For additional information on unit XY-OF-UL-280x280+ACR260UT CLICK HERE!
For additional information on unit XY-OF-UL-350x350+ACR335UT CLICK HERE!

About IntelLiDrives --
IntelLiDrives, Inc. manufactures linear actuators, XY tables and rotary tables for the industry, government, science and research institutions around the world. Our precision rotary actuators, XY stages and linear actuators are used in the applications in medical devices, life sciences, semiconductor and electronic assembly manufacturing, data storage, laser processing, military/aerospace, photonics, automotive and test assembly, research and development and other industries requiring high precision and throughput motion control solutions.
For further information on this new product or others in our extensive product portfolio, call 1-215-728-6804 or e-mail Intellidrives at sales@intellidrives.com.com or go Intellidrive - Contact Us at: www.intellidrives.com/contact-us
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